发明名称 Method for determining silicon content in layers of aluminum and silicon
摘要 The method provides an extremely fast and non-destructive method for determining whether an integrated circuit will have good bonding characteristics. The method entails immersion plating of copper onto aluminum areas. Then, the aluminum areas are observed visually to see if the copper plated thereon is continuous or discontinuous. If the copper is discontinuous, the aluminum film will have good bonding characteristics.
申请公布号 US4282266(A) 申请公布日期 1981.08.04
申请号 US19800154598 申请日期 1980.05.29
申请人 RCA CORPORATION 发明人 FISHER, ALBERT W.
分类号 H01L21/66;(IPC1-7):B05D5/12;C23F1/00 主分类号 H01L21/66
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