| 摘要 |
PURPOSE:To improve an exposure accuracy by a method wherein a means which irradiates light onto a sample surface, a means which irradiates light onto a sample surface, a means which detects a reflection light from the sample surface and a means which controls so that an image forming position of an electronic beam may coincide with the sample surface based on a reflection photo quantity, are installed in an electronic beam exposure device. CONSTITUTION:A fiber bundle 9 for light projection and light receiving is installed in an electronic beam exposure device which is composed of an electron gun 1, an irradiation lens 2, an objective lens 4, a deflecting device 5, a CPU6, a stage 7 having a sample 3 on it and a stage driving means 8. A light from a light source 14 is irradiated onto the sample 3 through a tube 12 and a photo fiber 9 and then, the reflected light is detected in a photoelectric detector 15 via the photofiber 9 and a tube 13, and then, an electrostrictive element 11 is controlled to vary the relation between the fiber bundle and the sample so that the information may be stored in a CPU and the image forming position of the electronic beam may coincide with the sample surface. With this, even if the sample is moved on a horizontal plane, the electronic beam is not made obscure and high accurate exposure can be performed. |
