| 摘要 |
<p>PURPOSE:To enable the wiring in high density having a favorable efficiency of work and to obtain a minute fine coil by a method wherein a spiral conductor pattern being within the specified respective ranges of conductor breadth, gap between conductors, conductor thickness, is formed on a film having a specified thickness. CONSTITUTION:The spiral conductor pattern of conductor breadth 40-115mum, gap between the conductors 10-63mum, conductor thickness 15-58mum, is formed on the film having the thickness of 5-50mum. To perform this formation, the thin film conductor of 0.1-10mum thickness is formed on the film at first, and then the conductor of 5-58mum thickness is formed by electrolytic plating under the condition of the cathode current density to be 3-20A/dm<2>.</p> |
