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发明名称
摘要
申请公布号
DE2315797(C3)
申请公布日期
1981.07.30
申请号
DE19732315797
申请日期
1973.03.29
申请人
SIEMENS AG, 1000 BERLIN UND 8000 MUENCHEN, DE
发明人
NIEDERMEINER, KARL, 8081 AICH, DE;WINTZER, MANFRED, 8034 UNTERPFAFFENHOFEN, DE
分类号
B28B3/02;B28B1/30;C04B35/111;C04B35/64;H01L21/48;(IPC1-7):C04B35/10
主分类号
B28B3/02
代理机构
代理人
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