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发明名称
MEASURING DEVICE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPS5692475(A)
申请公布日期
1981.07.27
申请号
JP19790170102
申请日期
1979.12.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
SHINOMIYA KOUJI
分类号
G01R31/26;G01R31/28;G01R31/316;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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