发明名称 CONTINUOUS LIQUIDUS EPITAXIAL GROWTH DEVICE
摘要 PURPOSE:To prevent the contamination of an alloy for growth by providing a removable frame body for accommodating and storing an alloy for growth in the transparent hole of the slider in a liquidus epitaxial growth device wherein the work for filling the alloy for growth is simplified. CONSTITUTION:A slider 12 having an operating bar 16 is installed on a fixed section 11 fixed a semiconductor substrate 13 and a frame body 17 serving as the accommodation and storage of a coagulated alloy 15 for growth is removably mounted in the transparent hole 14 of the slider. The alloy for growth constituted of previously desired composition will be prepared under coagulated status by the use of the frame body. Therefore, the work for filling the alloy will be simplified and the contamination of the alloy will also be prevented. Furthermore, the replacement of the frame body only will be allowed even if the base section of the frame body is damaged by an abnormal growth section or the like and the replacement of the whole slider will be unnecessary.
申请公布号 JPS5691419(A) 申请公布日期 1981.07.24
申请号 JP19790168095 申请日期 1979.12.26
申请人 FUJITSU LTD 发明人 YAMAGUCHI AKIO
分类号 H01L21/208;C30B19/06 主分类号 H01L21/208
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