| 摘要 |
<p>PURPOSE:To detect promptly the adhesion amount of a film, while securing safety to a human body, by detecting the total reflection amount of infrared rays from the film obtained by chemical formation thereby to detect the extinction or absorption degree of the infrared rays. CONSTITUTION:Infrared rays generated by an infrared ray source 2 are, after having been reflected by a mirror 3, an interferometer 4, a first concave mirror 5 and an input surface 6a of a concave mirror 6, collected by a first spherical mirror 7 and then irradiated to the surface of a film 10b of a chemically forming plate 10. As shown by a broken arrow, infrared rays reflected by a steel plate 10a of the plate 10 after absorption by the film 10b are reflected by a second spherical mirror 11 and further reflected by an output surface 6b of the conical mirror 6. Thereafter, the infrared rays are fed to a detector 14 through a second concave mirror 12 and a third concave mirror 13. The reflection amount of the infrared rays detected by the detector 14 is digitalized by an A/D converter 15 to be inputted to a computer 16, whereby the extinction degree or absorption degree of the infrared rays resulted from phosphoric molecules is obtained. The computer 16 then calculates the weight W per unit area, that is, the adhesion amount of the chemically formed film based on the extinction or absorption degree of the infrared rays.</p> |
