| 摘要 |
PURPOSE:To obtain a resistance element having little dispersion by a method wherein a diffusion layer on a surface of a substrate and the inverse conduction type substrate under the layer are connected in series, and the reverse of the variation directions of both resistance values is utilized. CONSTITUTION:Openings 11, 12 are formed to an insulating film at both sides of a p layer 4b, and electrodes 9, 13 are each taken out. The electrode 9 is connected 7 to one end of the layer 4b, and an electrode 15 is connected 14 to the other end. The resistance of a surface, which holds the p layer 4b, of an n layer 2 is made less than a lower section 16 of the p layer 4b. When the diffusion sheet resistance rho of the p layer 4b is deviated to a lower section, the layer 4b is deepened by means of heat treatment, and the section 16 is thinned and its resistance is changed into high one. When the resistance is deviated to an upper section, on the contrary, its resistance is turned into low one. Thus, since the p layer 4b and the section 16 of the n layer 2 are connected in series and the resistance values mutually vary in the reverse directions, dispersion is decreased as a resistance element. |
