发明名称 |
Cathode shielded coating apparatus |
摘要 |
A vacuum evaporator includes a housing defining a vacuum chamber which has a mounting for an evaporative material and an electrode spaced from the evaporative material which is arranged adjacent the support for a substrate to be coated. A screening element is located between the electrode and the substrate support in the vacuum chamber. The vacuum chamber has a gas inlet port through which gases may be passed.
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申请公布号 |
US4279216(A) |
申请公布日期 |
1981.07.21 |
申请号 |
US19800115729 |
申请日期 |
1980.01.28 |
申请人 |
BALZERS AKTIENGESELLSCHAFT FUER HOCHVAKUUMTECHNIK UND DUENNE SCHICHTEN |
发明人 |
BUHL, RAINER;SIGNER, HANS |
分类号 |
C23C14/02;C23C14/32;C23C14/58 |
主分类号 |
C23C14/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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