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发明名称
PLASMA ETCHING METHOD
摘要
申请公布号
JPS5687666(A)
申请公布日期
1981.07.16
申请号
JP19790164729
申请日期
1979.12.20
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
OKANO HARUO;HORIIKE YASUHIRO;SUGAWARA TAKUJI
分类号
C23F4/00;C23F1/00;H01L21/302;H01L21/306;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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