| 摘要 |
PURPOSE:To optimize the characteristics of a solar battery element by adhering an antireflection layer or the like on the surface of a solar battery element while monitoring the characteristics of the element providing electrodes at both sides of the element. CONSTITUTION:A light source 5 and a solar battery element 6 having electrodes at both sides of the element are housed in a vacuum container 1 having an evaporation source 3 and the light source 5 is lit to monitor the characteristics of the element 6 by a measuring device 13. Under this condition, a substance becoming an antireflection film or the like is evaporated to the surface of the element 6 from the evaporation source 3. The evaporation is stopped at the optimum value by monitoring the characteristics of the element 6 during the evaporation process. The above method will be applied to the evaporation of Schottky barrier metal in addition to the formation of the antireflection film. |
