| 摘要 |
PURPOSE:To control a temperature more accurately by a method wherein a plasma generating means is installed inside a reaction tube of the plasma reaction device, and electric furnaces are provided on the outside of the reaction tube through shield members. CONSTITUTION:The plasma generating means 3 constructed by two guide members 4 and holder member 5 which are mounted on the guide members 4 is installed inside the reaction tube 1, and the electric furnaces 6 are provided outside the reaction tube 1 through the shield member 7. Due to the presence of the shield members 7, the temperature control can be made more accurately because high frequencies produced by the plasma generating means give no influence to a thermocouple to be used for the electric furnace control. |
