发明名称 |
Locking mechanism for use in a chuck for an optical alignment and exposure apparatus |
摘要 |
A locking device for use in the chuck of an optical alignment and exposure apparatus is disclosed. The locking device comprises a plurality of flat, flexible blades fastened in pairs to a chuck plate in the chuck. Between each pair of blades there is a stationary element fastened to a base member in the chuck. Vacuum cups are fastened to the blades so that the blades are clamped tightly against the stationary element when the vacuum cups are evacuated.
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申请公布号 |
US4278348(A) |
申请公布日期 |
1981.07.14 |
申请号 |
US19790097331 |
申请日期 |
1979.11.26 |
申请人 |
QUINTEL CORPORATION |
发明人 |
FUNK, ERNEST J.;WING, THOMAS;LANE, JACK C.;WESTBROOK, IV, EDWARD S. |
分类号 |
G03B27/60;G03F7/20;(IPC1-7):G03B27/60 |
主分类号 |
G03B27/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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