| 摘要 |
PURPOSE:To obtain the titled substrate with a reduced amount of variance of electric resistance value for the heater layer, by exposing the trimming heater layer connected to the generating heater layer inside the substrate onto the outer surface of the substrate and trimming the trimming heater layer. CONSTITUTION:The substrate material 14 containing the pierced holes 14a-14e is stacked onto the substrate material 11 containing the generating heater layer 12 plus the platimum lead wires 13a, 13b and 13c each. The reference side electron transmission layer 16, solid state electrolytic material layer 17 and measurement side electron transmission layer 18 are laminated on the material 14, along with formation the trimming heater layers 19a and 19b. The conductive paste is flowed into the holes 14a-14e and dried to obtain the conducting parts 14f-14j, and the obtained lamination substance is burned in the air at about 1,500 deg.C for about two hours to give the sintering to each layer. After this, the layers 19a and 19b connected in series via the parts 14f and 14g are trimmed by the sandblast method or the like to secure the fixed value for the electric resistance of the heater layer. |
