| 摘要 |
PURPOSE:To obtain homogeneous glass layers with high reproducibility by synthesizing glass fine particles in a reactor, depositing them on substrates in the reactor, and heating the substrates to convert the particles into transparent glass layers. CONSTITUTION:Halide of Si, Ti or the like and oxygen or steam introduced into reactor 1 are heated with heater 5 to form oxide glass fine particles of SiO2, TiO2 or the like by oxidation or hydrolysis, and the particles are deposited in reactor 1 in an about uniform thickness. Accodingly, glass fine particles 7 are also deposited on substrates 6. Each substrate 6 with glass fine particle layer 7 deposited is fixed on substrate stand 11 having a smooth surface and made of refractory material such as graphite, and substrate 6 is heated with heater 12 to make layer 7 transparent. Patterning is then carried out in a predetermined process. |
