| 摘要 |
PURPOSE:To enhance the efficiency of evaporation compared to a conventional process by a method wherein a tape like substrate is moved through a contact part between at least two cans rotating to a reverse direction and obliquely projecting vapor dsposition is carried out to the above described substrate from a lower evaporating source. CONSTITUTION:At least two cylindrical cans 4, 5 rotating to a reverse direction are made adjacent so as to be contacted in a vacuum chamber consisted of a low vacuum chamber 1 and a high vacuum chamber 2 through a partition wall 6 and flexible substrates 3, 3' are moved through the contact part 7 between the cans 4, 5 and the obliquely projecting vapor deposition of Fe, Co or Ni is carried out onto the substrate 3 from the evaporating source arranged to a lower part of the contact part 7 through masks 10, 11 by an appropriate method. By this method, the evaporation is carried out to both surfaces of the substrates 3, 3' and the efficiency of evaporation is enhanced. This method is suitable for producing a magnetic recording medium due to the formation of a magnetic membrane of a ferromagnetic alloy. |
