| 摘要 |
PURPOSE:To form the film of a uniform thickness easily, by rotating the disc while forming ultrafine grains in the pressure reduction gaseous atmosphere and by sticking ultrafine grains, which passed through the slit, to the disc. CONSTITUTION:Slender board 2 and shielding plate 4 are arranged in a vacuum vessel, and the pressure reduction atmosphere is set dependently upon inert gas in the vacuum vessel. Under this state, board 2 is heated to heat metal 3, and disc 1 is rotated around center (l) while evaporating metal 3. Thus, metallic ultrafine grains formed in the pressure reduction gaseous atmosphere rise as shown by the dotted lines, and a part of them passes through slit 5 and is stuck onto disc surface 1A. Since disc 1 is rotated, the metallic ultrafine grains sticking region on disc surface 1A is extended gradually toward the circumference, and metallic ultrafine grains are stuck to all the surface when disc 1 is rotated once, thus forming ultrafine grained film 6 of a uniform thickness. |
