发明名称 |
Improvements in or relating to apparatus for a reative plasma process. |
摘要 |
<p>The quality of a plasma etching process is improved by withdrawing a small current from the plasma which causes the reaction to produce a uniform, controllable self-bias on a workpiece placed on one plasma energizing electrode. A DC potential supporting the current may be applied by means of a probe (26) positioned in the plasma or to one of the plasma energizing electrodes.</p> |
申请公布号 |
EP0031704(A2) |
申请公布日期 |
1981.07.08 |
申请号 |
EP19800304664 |
申请日期 |
1980.12.22 |
申请人 |
WESTERN ELECTRIC COMPANY, INCORPORATED |
发明人 |
KUYEL, BIROL |
分类号 |
H01L21/302;H01J37/32;H01L21/3065;(IPC1-7):01J37/32 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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