发明名称 |
Method for generating layers on a carrier foil |
摘要 |
Method and apparatus for generating layers on a carrier film wherein a plurality of glow polymerization layers and intervening metal layers are applied to a carrier foil 3 on a continuous process. The carrier foil is passed over a drum 4 and conducted through a first vacuum system wherein glow polymerization electrodes apply glow polymerization layers to the foil then the foil passes through a vacuum lock into a second vacuum chamber wherein a metallization device 10 is situated so as to apply a metallization layer. Then the foil passes through a second vacuum lock to the first vacuum chamber wherein a second polymerization layer is applied over the metallization layer. A diaphragm strip 19 also passes over the foil and is continuously used during the polymerization and metallization steps.
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申请公布号 |
US4277516(A) |
申请公布日期 |
1981.07.07 |
申请号 |
US19790107828 |
申请日期 |
1979.12.28 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
BEHN, REINHARD;HEYWANG, HERMANN;PACHONIK, HORST |
分类号 |
C23C14/56;H01G4/14;(IPC1-7):B05D5/12;H01G7/00 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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