发明名称 Method for generating layers on a carrier foil
摘要 Method and apparatus for generating layers on a carrier film wherein a plurality of glow polymerization layers and intervening metal layers are applied to a carrier foil 3 on a continuous process. The carrier foil is passed over a drum 4 and conducted through a first vacuum system wherein glow polymerization electrodes apply glow polymerization layers to the foil then the foil passes through a vacuum lock into a second vacuum chamber wherein a metallization device 10 is situated so as to apply a metallization layer. Then the foil passes through a second vacuum lock to the first vacuum chamber wherein a second polymerization layer is applied over the metallization layer. A diaphragm strip 19 also passes over the foil and is continuously used during the polymerization and metallization steps.
申请公布号 US4277516(A) 申请公布日期 1981.07.07
申请号 US19790107828 申请日期 1979.12.28
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 BEHN, REINHARD;HEYWANG, HERMANN;PACHONIK, HORST
分类号 C23C14/56;H01G4/14;(IPC1-7):B05D5/12;H01G7/00 主分类号 C23C14/56
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