| 摘要 |
PURPOSE:To manufacture a sensor, made of ultrafine granular material, having excellent responding property and sensitivity, by arranging a substrate nearly parallel to the flow of the ultrafine granular material in the formation of film with said ultrafine granular material on the substrate. CONSTITUTION:This method relates to the manufacture of ultrafine granular material film which detects the concn. of steam etc. at high sensitivity. In vapor coating of a substrate 3 arranged in a vacuum evaporation apparatus 1 by heating material to be evaporated 5 placed in a evaporation boat 4 with electric power source 8, the substrate 3 is placed parallel to the flow 12 of the ultrafine granular material. To perform the vapor coating more surely, the flow 12 of the ultrafine granular material around the substrate 3 may be controlled by providing a hollow cylindrical guide 13, which encloses at least one part of the substrate 3 in the logitudinal direction. Hereby a sensor having excellent responding property and sensitivity is manufactured easily. |
