| 摘要 |
PURPOSE:To make it possible to control substrate temp. easily and precisely, by providing cooling pipe airtightly at a part of the internal wall of an airtight chamber in order to cool the substrate to be vapor coated. CONSTITUTION:An airtight chamber is equipped with a cooling pipe 9 at the internal wall surface and is continued to the outside with a pipe 9'. After a substrate is mounted to a substrate holder 2, the chamber is evacuated to about >=10<-6>Torr by a vacuum pump 7. During the evacuation, the substrate is heated by a substrate heater 8 to 100 deg.C, and the temp. is kept at an equilibrium by passing water through the pipe 10 attached to the external wall surface of a bell jar 1. After the bell jar is kept at the temp. for about 1hr, the material in an accommodating vessel 5 for evaporating material is heated by an electric power source 6 so as to be degassed with a shutter 4 closed as it is. Then film is formed on the substrate by opening the shutter 4. When the temp. of the substrate begins rising, temp. rise is prevented by cooling with the cooling pipe 9 by turning the heater 8 off. Hereby the substrate temp. is kept constant. |
