| 摘要 |
PURPOSE:To make defect-correcting operation efficiency by providing a circuit generating an intermediate set value between the maximum and minimum set values of the line width of the pattern and further by providing a comparison circuit distinguishing a surplus from an insufficiency and defect based on the compared relative sizes between the intermediate set value and the line width, as well as a circuit detecting black points and pin holes of the pattern. CONSTITUTION:From the intermediate-value generating circuit 21, the signal of the intermediate set value N between the maximum line width set value Ma and the minimum line width set value Mi is inputted to the intermediate set value comparison circuit 20. In the comparison circuit 20, a signal from a length-measuring circuit 9 is compared, and, with regard to a line-width signal between N and Mi in a lead part, the presence of a projected part is shown, while in a land part the presence of a large defect is shown. An intermediate signal between Ma and N shows the presence of a large projection in the lead part and that of a faulty part in the land part. Meanwhile, receiving the pattern data of a memory 8, the detecting part 22 for black points and pin holes detects the black points and pin holes in a prescribed area (100mu) inside and outside of the pattern. Accordingly, the correcting operation can be performed efficiently. |
