High speed scanning mirror - has close spaced yoke support and has electrostatic drive for pivoted permanent magnet unit

摘要

The scanning mirror (2) has a hollow structure support with crossed spring axes (4) about which it pivots. The mirror operates at the resonant frequency and with a minimum of distortion. The axle supports are fitted alongside a permanent magnet (9) and the plate is driven electrostatically. The hollow structure is cellular using horizontal and vertical bores (14). Lightweight alloy casting provides a low inertial mass with a strong mounting. A reflection sensor (15) monitors the amount of deflection and operates the drive.