ROTARY COATING APPARATUS,申请号JP19790158917-传众专利搜索

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发明名称	ROTARY COATING APPARATUS
摘要
申请公布号	JPS5681159(A)	申请公布日期	1981.07.02
申请号	JP19790158917	申请日期	1979.12.07
申请人	FUJITSU LTD	发明人	KOBAYASHI KENICHI
分类号	B05C11/08;H01L21/027;H01L21/30	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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