| 摘要 |
PURPOSE:To realize a uniform sputtering process for a magnetic disk, by shifting the carrier holding a magnetic disk within a vaccum device while being turned by the sprocket chains moving in the opposite side to each other. CONSTITUTION:The sprocket 3 is provided to the carrier 2 holding the magnetic disk 1 to be held between the sprocket chains 14 and 17 which move in the opposite direction to each other within a vaccum device 20. Accordingly, the disk 1 moves within the device 20 while turning, and a uniform sputtering process is given by the target 11 in the sputtering chamber 10. In such way, a high-quality magnetic disk can be mass-produced surely. |
