| 摘要 |
PURPOSE:To obtain a grown film with good reproducibility by growing a magnetic garnet epitaxial film on Cd3Ga5O12 (GGG) monocrystal plate by hydrolysis reaction of organic metal. CONSTITUTION:Europium octylate, Yttrium octylate, iron butoxide, and gallium butoxide are weighed to become the molar ratio of an objective film. A solution added anhydrous butanol of 20w% to the above is prepared. The solution is uniformly applied on a GGG monocrystal substrate by using a spinner. And the substrate is dried in the air at normal temperature for 30min then in a thermostatic oven at 110 deg.C for 30min. Then, the substrate is heated in an electric furnace at 800 deg.C for 30min. In this case, saturated steam at normal temperature generating by bubbling and oxygen as carrier gas are fed into the electric furnace. A grown film having about 0.4mum film thickness will be obtained with good reproducibility by this process. |
