发明名称 PRODUCTION OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 PURPOSE:To obtain an integrated circuit having a desired function by changing the characteritics of a plurality of bi-polar transistors combined in an integrated circuit by varying the depth of the base region of each transistor. CONSTITUTION:On the surface of a P type semiconductor substrate 1, N<+> type buried layers 2a and 2b, N type semiconductor layers 3a and 3b to be collector regions, P<+> type semiconductor separating layers 4a-4c and P type semiconductor layers 5a and 5b to be base regions are formed by the ordinary method. Then only the surface of the P type semiconductor layer 5b of the NPN transistor needing a high hFE is selectively etched. By varying the etching amount, the depth of the P type semiconductor layer 5b to be base region is changed to control the value of hFE. Said procedure permits an integrated circuit including bi-polar transistors of different characteristics to be readily prepared.
申请公布号 JPS5680155(A) 申请公布日期 1981.07.01
申请号 JP19790158499 申请日期 1979.12.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 IDOGAMI TAKASHI
分类号 H01L21/8228;H01L27/082 主分类号 H01L21/8228
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