| 摘要 |
PURPOSE:To obtain uniformly deposited film thickness distribution with the use of a conical basket-shaped heater 13 by properly specifying the aperture array pitch of a mesh structure plate, aperture ratio, the distance between an evaporation source and the inner surface of a glass panel and the distance between the evaporation source and the mesh structure plate. CONSTITUTION:A metalback film 4 is formed by vacuum deposition using a conical basket-shaped heater 13. The minimum diameter dmm. facing the glass panel 1 of an evaporation source, the aperture array pitch Pmm. of a mesh structure plate 14, the distance L between the evaporation source and the inner surface of the glass panel 1 and the distance l between the evaporation source and the mesh structure plate 14, and each aperture ratio TC% or TE% of the mesh structure plate 14 corresponding to the center and periphery of the glass panel 1 are selected to satisfy the relationship of 0.7<=p<4.0, 20<=TC<=60, TE>=75, d>=5, 0.2<=l/L<= 0.7. |
