发明名称 |
Diffusion furnace microcontroller |
摘要 |
An automatic microprocessor-based control system for a diffusion furnace in which the controller is dedicated to a single associated diffusion tube to provide all monitoring and control functions necessary for a variety of diffusion processes. The controller provides direct digital control of time, temperature and gas flow, and can be readily operated with a variety of control algorithms.
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申请公布号 |
US4276603(A) |
申请公布日期 |
1981.06.30 |
申请号 |
US19790089631 |
申请日期 |
1979.10.30 |
申请人 |
BTU ENGINEERING CORPORATION |
发明人 |
BECK, MARTIN A.;FABRICIUS, JOHN H.;LANDIS, DONALD G. |
分类号 |
G06F19/00;(IPC1-7):G06F15/46 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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