| 摘要 |
PURPOSE:To improve the accuracy and the speed of processing, by setting a plurality of regions in a scanning picture face while setting the scanning speed and the data take-in time for each region. CONSTITUTION:A timing control circuit 13 will produce counts for coordinate counters 14, 15, sample pulse for sample hold 22, a reset signal 55 for an integrator 21, an integrating section signal 57, a converting instruction for AD converter 59, etc. in accordance with input clock. The output from the coordinate counters 14, 15 will form the deflection signal through DA counters 16, 17. The deflection signal will deflect the electron beam 7 of a microscope through amplifiers 80, 81 while used for the deflection of CRT23 through amplifiers 82, 83. The picture image signal obtained from a detector 9 is integrated in an integrating circuit 22 then provided to CRT23 while simultaneously provided through AD converter 24 and an interface 10 to a computor 100. |
