| 摘要 |
PURPOSE:To prevent the consumption of high-cost He by a method wherein mixed gas is treated with a catalyst wherein platinum is carried by magnesium perchlorate. CONSTITUTION:Mixed gas is treated with a catalyst obtainable by a method wherein platinum is carried on magnesium perchlorate. That is, the catalyst obtainable by a method wherein platinum is carried on magnesium perchlorate is used as a method for removing simultaneously O2 and H2O, which are substances to cause a reduction in a laser output, by chemical reaction. Accordingly, the O2 and the H2O, which cause the reduction in a laser output and are in the gas flow path of a laser oscillator, can be removed simultaneously and completely. Thereby, the loss of high-cost He can be prevented. |
