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发明名称
Apparatus and method for producing thin-film circuits
摘要
申请公布号
GB2064816(A)
申请公布日期
1981.06.17
申请号
GB19800035565
申请日期
1980.11.05
申请人
BROWN BOVERI & CIE AG
发明人
分类号
H01L27/01;H05K1/16;H05K3/02;H05K3/14;H05K3/22;H05K3/28;(IPC1-7):G05B15/02
主分类号
H01L27/01
代理机构
代理人
主权项
地址
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