发明名称 TRANSFER DEVICE
摘要 <p>PURPOSE:To weaken a dust generating property with simple constitution by forming a through-hole through which a support can be inserted and withdrawn and transferring a mounting plate on which a substance to be processed is mounted in the withdrawal of support. CONSTITUTION:A substance 1 to be processed transferred by a belt conveyer is lifted and supported by a pusher 9 elevated through a through-hole 8 in a tray 6. The belt conveyer is opened left and right under such condition and the pusher 9 is slowly lowered, so that said substance 1 is mounted on the tray 6, fitting in a groove 6a thereof and the pusher 9 is completely withdrawn out of the through-hole 8 in the tray 6. When said substance 1 is mounted on the tray 6, a rotary transfer arm 10 is moved right below the tray 6 and a tray pusher 7 is lowered to mount the tray 6 on the distal end of said arm 10. Said substance 1 is transferred to a preparatory chamber by rotating the rotary arm 10.</p>
申请公布号 JPS6445543(A) 申请公布日期 1989.02.20
申请号 JP19870203073 申请日期 1987.08.17
申请人 TOSHIBA CORP 发明人 YAMADA HIROSHI;IIMORI HIROSHI
分类号 B23Q7/04;B65G47/74;B65G47/90;H01L21/677;H01L21/68 主分类号 B23Q7/04
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