MANUFACTURE OF COLORRSEPARATING FILTER

摘要

PURPOSE:To obtain a color-separating filter free of a breakaway with good reproducibility by vapor-depositing ZnxCd1-xS (0<=X<=1) at a specific vapor-deposition source temperature in stripes while holding a substrate for filter formation within a specific temperature range. CONSTITUTION:While the substrate for filter formation is kept at 70-200 deg.C, a solid solution of 20mol% ZnS and 80mol% CdS is used as a vapor-deposition source and its temperature is set to 700-1,000 deg.C so as to form a vapor-deposited film of ZnxCd1-xS (0<=X<=1) composition on the surface of the substrate. Under those temperature conditions, the adhesion between the substrate and filter is high and the film with a proper ZnS-to-CdS mol ratio is formed. Next, the vapor-deposited film is photoetched in stripes. In this case, the occurrence of a breakaway between the vapor-deposited film and substrate is eliminated. Thus, the color-separating filter of 450-500nm in absorption terminal wavelength is manufactured with good reproducibility.