PRECISION OSCILLATION ISOLATING STAND

摘要

PURPOSE:To rapidly damp down a complex oscillation and obtain a favorable responsiveness in the oscillation isolating stand of precision equipment, etc. by providing a limiter in an electron circuit, responding to the amplitude of only a specific value, and integrally forming a sensor and a damper on the same shaft. CONSTITUTION:A sensor 13 detects the oscillation of a surface plate 11. An electron circuit 14 consists of a signal processing part 18 and a brake controlling part 19. The brake controlling part 19 properly sets a braking force and drives a braking device so as to rapidly damp down the oscillation of this system. A limiter 15 is provided in the electron circuit 14 to respond to only oscillations above a defined value. The sensor 13 and a damper are integrally formed on the same shaft. Thereby, the rapid damping down of a complex oscillation and a favorable responsiveness to the oscillation of natural oscillation of a low frequency can be obtained.