| 摘要 |
PURPOSE:To obtain the magnetic recording medium suitable for high density recording, by forming the thin film of ferromagnetic substance, through the injection of cluster ion beam with an incident angle more than the specified angle to the normal of the base, on the base of nonmagnetic substance. CONSTITUTION:On the substrate of nonmagnetic substance such as polyethylene terephthalate film, the thin film of ferromagnetic substance is formed with the cluster ion beam vapor deposition through the use of cobalt including metal and mixture of cobalt and other metal. In this case, the cluster ion beam is injected on the surface of the substrate in the incident angle more than 30 deg. to the normal of the substrate. Thus, the easy magnetization axis shows uniaxial anisotropy, and the thin film of ferromagnetic substance in which the coercive magnetic force in axial direction is rapidly increased, can be formed on the substrate. |
