| 摘要 |
PURPOSE:To enable the acceleration of a linear pulse motor by providing the first movable element relatively moving with respect to a stator 1 and the second movable element relatively moving with respect to the first element, thereby improving the responding property. CONSTITUTION:Teeth 13 and grooves 14 are alternately formed on the upper surface of a stator 12 thereby forming the first teethed member 15, and first excitation coil 16 is wound on the respective teeth 13. Teeth 17 and grooves 18 are so formed as to confront the first member 15 on the lower surface of the first movable element 11 thereby forming the second teethed member 19. The widths of the teeth 13 and 17 are largely formed. Teeth 22 and grooves 23 are formed through nonmagnetic unit 20 at the upper part of the member 19 thereby forming the third teethed member 21. A pole teeth 25 wound with second excitation coil 26 is projected from the lower surface of the second element 24 disposed at the upper part of the element 11. The pitches P2 of the teeth 22, 25 are formed extremely shortly so as to enhance the stopping position accuracy of the movable element. |
