| 摘要 |
PURPOSE:To form a pattern whose joint accuracy is high, by forming the pattern by superposing each of plural pattern parts whose joining positions are different from each other, distributing the energy radiated thereby to respective groups of plural groups, and executing the radiation to each group by using this energy. CONSTITUTION:Joining positions 13b-13d of respective groups of plural pattern parts 11c and 11d, 11e and 11f, and 11g and 11h of plural groups are allowed to be different from each other. Accordingly, even if the dislocation is generated in each of the pattern parts 11c and 11d, 11e and 11f, and 11g and 11h in the joining positions 13b-13d of some group, no dislocation is generated in other group. Also, as for the energy to be radiated to each group, the energy which is radiated in order to form a pattern 11 is distributed to respective groups of plural groups, therefore, no pattern is formed by only the energy of the quantity radiated to the dislocated part in the pattern parts 11c and 11d, 11e and 11f, and 11g and 11h. In such a way, the dislocation generated in the pattern 11 formed by superposing each group becomes small. |
