发明名称 |
UN SISTEMA OPTICO DE DETECCION DE ERROR DE ENFOQUE |
摘要 |
<p>A focussing error detection system is described for determining deviations between the plane of imaging of an objective system in an optical arrangement and the radiation-reflecting surface in said system. The apparatus comprises an optical element by means of which a radiation beam coming from the radiation reflecting surface is both rendered astigmatic and separated from a radiation beam which is directed to the radiation-reflecting surface. By the use of this element the number of components of the focussing-error detection system can be minimized and a compact construction of said system can be obtained.</p> |
申请公布号 |
ES495326(D0) |
申请公布日期 |
1981.06.01 |
申请号 |
ES19260004953 |
申请日期 |
1980.09.25 |
申请人 |
N.V.PHILIPS'GLOEILAMPENFABRIEKEN |
发明人 |
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分类号 |
G02B7/28;G11B7/09;(IPC1-7):11B7/08 |
主分类号 |
G02B7/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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