| 摘要 |
PURPOSE:To reduce the insertion loss of the surface elastic wave element, by burying the comb-line electrode within the hollow part of the piezoelectric substrate. CONSTITUTION:The resist 3 is applied to the quartz plate 1 to form a recess part on the plate 1. Then the aluminum 21 is buried through vapor deposition so as to just fill the recess part. After this, the resist 3 is deleted to remove the aluminum 20 on the resist 3, and then the aluminum is buried into the recess part of the plate 1. Thus a surface elastic wave element is obtained with a comb-line electrode formed. The electric line of force affects effectively and directly the electric field for said wave element, thus enhancing the converting efficiency of energy. |
