| 摘要 |
<p>PURPOSE:To obtain a device of simple structure capable of coping with various kinds of wafer size by constituting a stage in a manner in which it can travel the distance corresponding with various kinds of wafer size, and providing an optical microscope with a CCD sensor in order to detect an orientation flat and a pre-alignment mark by using the same optical microscope. CONSTITUTION:In order to detect the orientation flat and the pre-alignment mark of wafer 1, a stage 21 is installed, which moves the orientation flat 7 and the pre-alignment mark of wafer 1 into the visual field of an optical microscope. The stage is constituted in such a manner as to be able to travel the distance corresponding with various kinds of wafer 1 size. The optical microscope is provided with a CCD sensor 35, in order to detect the orientation flat and the pre-alignment mark by using the same optical microscope. After the wafer 1 is rotated and the position of the orient flat is detected by the CCD sensor 35, it is detected by a two-dimensional sensor like a television camera, and magnified on a television monitor 18. Thus the position of the orientation flat is accurately obtained, and whether the orientation flat 7 is aligned at a specified position or not is confirmed with the television monitor 18.</p> |
