| 摘要 |
PURPOSE:To produce an orientation effect in diagonal vapor deposition and enhance the film forming efficiency by placing an evaporation source and a vapor ionizing means, diagonally setting a vapor control plate of positive potential over the source, and providing an inert gas introducing means, etc. CONSTITUTION:Vacuum chamber 3 is formed in bell jar 1, and this apparatus is composed essentially of evaporation source 5, high frequency coil 7 of ionizing means 6 for ionizing vapor from source 5, vapor control plate 8 of positive potential diagonally set over source 5, inert gas introducing pipe 12 and holder 10 of substrate 9 receiving a vapor flow of evaporating substance 20. Substance 20 melted in source 5 is positively ionized, repulsed by plate 8, diagonally blown up along plate 8 by inert gas from the arrow A direction, and vapor deposited on substrate 9 of negative potential. Thus, the film forming speed can be increased, and the film forming efficiency as well as the orientation effect can be enhanced. |
