发明名称 Measuring low pressure in container - uses gas friction acting on turbo-molecular vacuum pump rotor with magnetic bearing
摘要 <p>The method for measuring low pressure in a container uses pressure dependent gas friction. The friction is measured from the associated variation in the revolution rate of the rotor of a turbomolecular vacuum pump. Alternatively, the time for the rotor to run up to a desired rate of revolution is used as the measure of pressure, or the time taken for the revolution rate to decrease from one defined value to another. A further approach involves measuring the rate of change of revolution rate whilst constant power is applied. Similarly, the power required in order to maintain a constant rate of revolution may be used as a measure of pressure.</p>
申请公布号 DE2945889(A1) 申请公布日期 1981.05.27
申请号 DE19792945889 申请日期 1979.11.14
申请人 LEYBOLD-HERAEUS GMBH 发明人 BEECK,DIPL.-PHYS.,UDO
分类号 F04D19/04;G01L21/16;G01L21/24;(IPC1-7):01L21/24;04D19/04 主分类号 F04D19/04
代理机构 代理人
主权项
地址