| 摘要 |
PURPOSE:To tightly contact a substrate to a dielectric film provided on a substrate fixing table by static electricity caused by friction. CONSTITUTION:A high frequency power source 3 is connected between electrodes 1 and 2. The electrodes 2 also serves as the substrate fixing table, and is cooled by water. A polyester film 5 is contacted on the electrode 2. The static electricity is generated by rubbing the film 5 with a piece of gauze, thereby the Si substrate 6 is electrostatically contacted tightly. In this constitution, the substrate 6 can be fixed to the fixing table without expensive auxiliary devices, and the etching can be uniformly performed under the sufficiently cooled state. |
