摘要 |
PURPOSE:To improve the yield of a thin-film solar cell comprising an insulative substrate on which a composite structure comprising a semiconductor layer having first conductive type and a semiconductor layer having second conductive type is formed and provided with metal wires, by providing the end of the upper semiconductor layer on a portion of the substrate where the lower semiconductor layer is not present. CONSTITUTION:On an insulative substrate 1, a mesa electrode 2 having a given pattern is formed, and the whole surface including it is coated with an N type thin-film semiconductor layer 3 of amorphous Si or the like, which is patterned to form into a given geometry. Then the whole surface including the layer 3, electrode 2 and the exposed surface of the substrate 1 is similarly coated with an amorphous P type thin-film semiconductor layer 4, which is patterned so that there is neither the electrode 2 nor the layer 3 at the end of the layer 4 which contacts with the substrate 1. After that, the whole surface is coated with a insulative film 5, in which openings are made to provide metal wires 6 for the electrode 2 and the layer 4. This eliminates the short-circuit at the contacts. |