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发明名称
LASER INTERFEROMETER AND ITS MEASURING METHOD
摘要
申请公布号
JPS5660306(A)
申请公布日期
1981.05.25
申请号
JP19790137136
申请日期
1979.10.23
申请人
MITSUTOYO SEISAKUSHO
发明人
BANDOU MOTONOBU;OOMORI SATOSHI
分类号
G01B11/00;G01B9/02;G01B11/03
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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