| 摘要 |
PURPOSE:To attain the large structure of an outlet for gas as much as possible without detracting anything from electric performance, by connecting a pressure limiting part to the high-frequency-range extraction part at the rear part of a resistive terminator. CONSTITUTION:The millimeter-wave branching filter consists of hybrids 12 and 12', cutoff filter 13 and high-frequency-range extraction part 14 and gas is exhausted from gas outlet of resistive terminator 15 of high-frequency-range extraction part 14. As for the structure of the high-frequency-range extraction part, resistive terminator 15 worked in a taper shape is arranged in the center of the rectangular waveguide and pressure control valve 17 is provided to the output waveguide of resistive terminator 15. This pressure control valve 17 can operate stably without detracting anything from the electric performance because of a little work of resistive terminator 15 and its circumference and with reduced fluid resistance of gas because the thickness of resistive terminator 15 is extremely thin. |
