| 摘要 |
PURPOSE:To increase the lifetime of the laser oscillator by passing cooling fluid through a passage formed in an insulator for supporting a cathode pin of a discharger, thereby sufficiently cooling the pin. CONSTITUTION:The passage 5a is internally formed in the insulator 5 for supporting the cathode pin 4 of the discharger, and cooling fluid is passed through the passage to thereby cool the pin 4. The cooling fluid passages 5a are connected by a pipe. The insulator 5 is formed of ceramic or the like having preferable thermal conductivity, and the pin holder 6 is made of metal having preferable thermal conductivity. When a discharge is operated for laser oscillation at the pins 4, heat is generated, but is derived of the cooling fluid so that the temperatue of the pins 4 can be maintained low, and the consumption of the oxidation can be suppressed. Further, the temperature in the discharging space is also lowered so that the inversion distribution of the laser medium gas is accelerated, and the efficiency in the laser oscillation can be improved. Thus, the cathode pins can be increased in lifetime. |
