| 摘要 |
<p>PURPOSE:To measure two absolute value of different pressure at the same time by providing a vacuum chamber on the opposite side from two pressure application part across two pressure sensing diaphragms provided to a semiconductor chip. CONSTITUTION:The two diaphragms 6a and 6b are formed on the semiconductor single crystal chip 4 and through holes 16a and 16b are formed in a pedestal 3 at the lower part. A stem 1 is formed of a glass material which has a coefficient of heat expansion close to that of the chip 4 and through holes 17a and 17b are bored. Then when the chip 4 is joined with the stem 1 by sealing, the vacuum chamber 13 is formed on the opposite side from the two pressure application parts. The atmospheric pressure is measured by one pressure application part and the pressure of, for example, an air suction manifold is measured by the other pressure application part. Thus, two absolute values of different pressure can be measured at the same time.</p> |
