METHOD FOR ELIMINATING EFFECT DUE TO BEAM DRIFT IN CHARGE CURRENT BEAM DEVICE

摘要

PURPOSE:To improve the workability of a charge current beam device by detecting the quantity of drift, controlling deflectors with it, and correcting the drift. CONSTITUTION:Before pattern plotting is performed, a beam is turned on and off for a fixed period of time with a blanking means 10. In this case, a beam receiver 13 which can move outside the beam channel during plotting is arranged on the beam channel above a sample 6 so that the beam cannot be irradiated on the sample 6. The beam is drifted due to the charge increase in the beam channel. Drift is corrected and patterns are plotted by detecting the quantity of drift and applying the signals corresponding to the quantity of drift to the exposure position command signals for a deflector 8 or to the sample position command to a motor.